Paper
18 October 2001 Electromagnetic optical switch for optical network communication
Chengtang Pan, S.C. Shen, His-harng Yang, Min-Chieh Chou, Shinn-Tyan Wu
Author Affiliations +
Proceedings Volume 4582, Optical Switching and Optical Interconnection; (2001) https://doi.org/10.1117/12.445100
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China
Abstract
The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68 mN, deflection angle can reach 82 degree(s) only with 4820A/m, frequency can reach 2 kHz, and bonding strength can be larger than 216 kg/cm2.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chengtang Pan, S.C. Shen, His-harng Yang, Min-Chieh Chou, and Shinn-Tyan Wu "Electromagnetic optical switch for optical network communication", Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); https://doi.org/10.1117/12.445100
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KEYWORDS
Magnetism

Optical switching

Electromagnetism

Microactuators

Optical communications

Optical networks

Excimer lasers

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