Dr. S.C. Shen Profile

Dr. S.C. Shen

Engineer at Industrial Technology Research Institute

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Author

Publications (5)

Proceedings Article | 19 April 2002 Paper

Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors

Hsiharng Yang, Chengtang Pan, S.C. Shen

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462842

KEYWORDS: Mirrors, Switches, Optical fibers, Optical switching, Excimer lasers, Etching, Semiconducting wafers, Switching, Laser ablation, Silicon

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Proceedings Article | 18 October 2001 Paper

Electromagnetic optical switch for optical network communication

Chengtang Pan, S.C. Shen, His-harng Yang, Min-Chieh Chou, Shinn-Tyan Wu

Proceedings Volume 4582, (2001) https://doi.org/10.1117/12.445100

KEYWORDS: Magnetism, Optical switching, Electromagnetism, Microactuators, Optical networks, Optical communications, Excimer lasers, Laser ablation, Microelectromechanical systems, Bulk micromachining

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Proceedings Article | 8 May 2001 Paper

Batch assembly microball lens array for Si-based optical coupling platform in free space

S.C. Shen, Chengtang Pan, Hwai-Pwu Chou, Yu Chao, Kun Lin, Yang Jauh Jung

Proceedings Volume 4416, (2001) https://doi.org/10.1117/12.427078

KEYWORDS: Silicon, Polymers, Optical fibers, Photoresist materials, Free space optics, Free space, Wafer bonding, Fiber couplers, Optics manufacturing, Semiconducting wafers

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Proceedings Article | 30 April 2001 Paper

Method of localized and low-temperature wafer bonding for microsystem packaging

S.C. Shen, Chengtang Pan, Hwai-Pwu Chou

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425301

KEYWORDS: Wafer bonding, Semiconducting wafers, Silicon, Photoresist materials, Glasses, Packaging, Sensors, Actuators, Microsystems, Microelectromechanical systems

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Proceedings Article | 30 April 2001 Paper

Self-parking fiber and self-latching vertical mirror for fiber optical switch array

S.C. Shen, Cheng-Tang Pan, Hwai-Pwu Chou

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425328

KEYWORDS: Mirrors, Switches, Etching, Semiconducting wafers, Excimer lasers, Silicon, Optical switching, Fiber optics, Gold, Anisotropic etching

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