Selective intermixing of InGaAs/GaAs/AlGaAs quantum wells with spin-on-glass/MgF2 grating caps

Yan-Rui Zhao; Julius Yellowhair; Jinhyun Lee; Shuang Zhang; Alex K. Raub; Ronghua Wang; Petros M. Varangis; Abdel-Rahman El-Emawy; Mauro F. Vilela; Marek Osinski

doi:10.1117/12.446541

29 October 2001 Selective intermixing of InGaAs/GaAs/AlGaAs quantum wells with spin-on-glass/MgF₂ grating caps

Yan-Rui Zhao, Julius Yellowhair, Jinhyun Lee, Shuang Zhang, Alex K. Raub, Ronghua Wang, Petros M. Varangis, Abdel-Rahman El-Emawy, Mauro F. Vilela, Marek Osinski

Author Affiliations +

Proceedings Volume 4594, Design, Fabrication, and Characterization of Photonic Devices II; (2001) https://doi.org/10.1117/12.446541
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

In order to achieve controlled degree of intermixing in selected areas (CISA), SiO₂ gratings are checked first to be able to influence the degree of intermixing during high-temperature rapid thermal annealing of InGaAs/GaAs quantum wells. Subsequently, SiO₂/MgF₂ gratings with different periods are used to cover different parts of MWQ sample and found to be suitable for achieving CISA after only a single annealing procedure.

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Yan-Rui Zhao, Julius Yellowhair, Jinhyun Lee, Shuang Zhang, Alex K. Raub, Ronghua Wang, Petros M. Varangis, Abdel-Rahman El-Emawy, Mauro F. Vilela, and Marek Osinski "Selective intermixing of InGaAs/GaAs/AlGaAs quantum wells with spin-on-glass/MgF₂ grating caps", Proc. SPIE 4594, Design, Fabrication, and Characterization of Photonic Devices II, (29 October 2001); https://doi.org/10.1117/12.446541

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