Adaptive modeling of MEMS system-level simulation based on evolutionary computation

Daoheng Sun; Chengzhi Wang; Wenwang Li

doi:10.1117/12.444710

15 October 2001 Adaptive modeling of MEMS system-level simulation based on evolutionary computation

Daoheng Sun, Chengzhi Wang, Wenwang Li

Author Affiliations +

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444710
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

System-level simulation, to which is paid much attention because of its multi-discipline, is a special requirement for MEMS analysis and design. In the article, an adaptive modeling methodology based on the evolutionary computation (ECM) is proposed, in accordance with the existed problems in present modeling. The lower order modals and the general independent functions are considered to construct the complete set. The dynamical equations of the reduced order model can be obtained. As an example, a static electrical actuator with micro cantilever is analyzed. The traditional modeling problems such as, how to find a good set of basic shapes, which elements should be selected in the base set, and how to construct the energy expression etc. can be solved by using ECM.

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Daoheng Sun, Chengzhi Wang, and Wenwang Li "Adaptive modeling of MEMS system-level simulation based on evolutionary computation", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444710

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