Some Aspects Of Anti-Reflective Coating For Optical Lithography

Yi-Ching Lin; Vic Marriott; Kevin Orvek; Gene Fuller

doi:10.1117/12.941774

21 May 1984 Some Aspects Of Anti-Reflective Coating For Optical Lithography

Yi-Ching Lin, Vic Marriott, Kevin Orvek, Gene Fuller

Proceedings Volume 0469, Advances in Resist Technology I; (1984) https://doi.org/10.1117/12.941774
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

One major limitation in optical lithography is the resist linewidth variation across steps on a highly reflective substrate. This problem can be alleviated by using an anti-reflective (AR) coating on a planarized multilayer resist surface. A spin-on AR coating provides a simple and economical approach for this purpose. However, the curing of the AR coating is a critical process step. An insufficient bake can result in undesirable undercut of the AR coating, while over baking leads to incomplete development. The coated AR thickness, the baking conditions, the exposure dose, and the development process, among others, interact in a complicated manner to impact the patterning accuracy of the resist/AR layers. In this paper, some aspects of the AR coating will be investigated to address the process complexity. Key interactive parameters will be identified, and a guideline to improve the process latitude will be given.

Citation Download Citation

Yi-Ching Lin, Vic Marriott, Kevin Orvek, and Gene Fuller "Some Aspects Of Anti-Reflective Coating For Optical Lithography", Proc. SPIE 0469, Advances in Resist Technology I, (21 May 1984); https://doi.org/10.1117/12.941774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available