Paper
9 July 2002 Aerospace applications of mass market MEMS products
Karin Bauer, Gerhard Kroetz, Josef Schalk, Gerhard Mueller
Author Affiliations +
Abstract
Aerospace applications of MEMS products, originally developed for automotive mass markets, are discussed. Various sensor examples with a high dual use potential are presented: inertial sensing, flow and gas sensing, robust micro sensors including SiC- and GaN-based devices, as well as first approaches towards flexible and distributed microsystems. In Europe the automotive industry is one of the main MEMS market drivers, simply because of the sheer size of this market and Europe's strong position in this industrial field. Main MEMS activities are development and integration of vehicle dynamics sensing systems, passenger safety and navigation systems, air and fuel intake systems, as well as sensor systems for exhaust gas after treatment and climate control. Benefits on the customer side are increased safety, passenger comfort and reduced fuel consumption. Benefits on the manufacturer's side are increased sub-system integration, modularity and reduced production cost. In the future the aerospace industry is likely to benefit from the introduction of micro-systems for the same reasons as the automotive industry. Interests of the aerospace industry are increasing safety and reliability of airplane operation, health and state monitoring of fuselage and airplane subsystems as well as improving service and maintenance procedures. In comparison to automotive applications, the numbers of devices needed is likely to be much smaller, however, new challenges arise in so far as distributed sensing and actuating microsystems will be needed. The idea is to identify and to exploit synergies between automotive mass market MEMS applications and lower-volume aerospace ones. The effort necessary to meet aerospace requirements and the extent of necessary trade-offs in customizing automotive MEMS is addressed considering the above-mentioned examples.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karin Bauer, Gerhard Kroetz, Josef Schalk, and Gerhard Mueller "Aerospace applications of mass market MEMS products", Proc. SPIE 4698, Smart Structures and Materials 2002: Industrial and Commercial Applications of Smart Structures Technologies, (9 July 2002); https://doi.org/10.1117/12.475096
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors

Aerospace engineering

Silicon

Microelectromechanical systems

Microsystems

Gas sensors

Silicon carbide

RELATED CONTENT

Challenge of automotive sensors
Proceedings of SPIE (September 26 1995)
Reliability issues of COTS MEMS for aerospace applications
Proceedings of SPIE (August 18 1999)
Aerospace applications of MEMS
Proceedings of SPIE (January 22 2005)

Back to Top