Characterization of MEMS by feedback interferometry

Valerio Annovazzi-Lodi; Sabina Merlo; Michele Norgia; Guido Spinola; Benedetto Vigna; Sarah Zerbini

doi:10.1117/12.462839

19 April 2002 Characterization of MEMS by feedback interferometry

Valerio Annovazzi-Lodi, Sabina Merlo, Michele Norgia, Guido Spinola, Benedetto Vigna, Sarah Zerbini

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462839
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

In this paper, we report on feedback interferometric measurements on a micromachined gyroscope and on a micromachined linear accelerometer. Characterization has been performed for different values of pressure and of other parameters using a laser diode. Resonance frequencies and quality factors have been measured. Moreover, hysteresis and other nonlinear phenomena on specific samples have also been detected. The proposed method is based on optical injection and represents an efficient alternative to the standard electrical measurements, which actually shows some limitations for bare prototype testing.

Citation Download Citation

Valerio Annovazzi-Lodi, Sabina Merlo, Michele Norgia, Guido Spinola, Benedetto Vigna, and Sarah Zerbini "Characterization of MEMS by feedback interferometry", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462839

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