Paper
19 April 2002 Micro-optical phased arrays for spatial and spectral switching
Olav Solgaard, Kyoungsik Yu, Uma Krishnamoorthy, Kebin Li, Jonathan Paul Heritage
Author Affiliations +
Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462796
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
This paper describes two optical devices based on linear arrays of micro mirrors. The first is a phased array of micro mirrors that can be rotated as well as translated vertically to maintain coherence across the array. We demonstrate experimentally that such micro mirrors are capable of high-diffraction-efficiency, phased-array scanning of laser beams. The second device is a Gires- Tournois interferometer with a micro mirror array that provides tunable phase modulation for the multitude of partially reflected beams within the interferometer. We demonstrate experimentally that the MEMS-GT interferometer can operate as a tunable deinterleaver for dense Wavelength Division Multiplexed fiber optic communication.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Olav Solgaard, Kyoungsik Yu, Uma Krishnamoorthy, Kebin Li, and Jonathan Paul Heritage "Micro-optical phased arrays for spatial and spectral switching", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462796
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Cited by 5 scholarly publications.
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KEYWORDS
Micromirrors

Mirrors

Phased arrays

Interferometers

Microelectromechanical systems

Phased array optics

Actuators

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