Large-scale polysilicon surface-micromachined spatial light modulator

Clara E. Dimas; Julie Perreault; Steven Cornelissen; Harold Dyson; Peter Krulevitch; Paul Bierden; Thomas Bifano

doi:10.1117/12.477932

20 January 2003 Large-scale polysilicon surface-micromachined spatial light modulator

Clara E. Dimas, Julie Perreault, Steven Cornelissen, Harold Dyson, Peter Krulevitch, Paul Bierden, Thomas Bifano

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477932
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A large-scale, high speed, high resolution, phase-only microelectromechanical system (MEMS) spatial light modulator (SLM) has been fabricated. Using polysilicon thin film technology, the micro mirror array offers significant improvement in SLM speed in comparison to alternative modulator technologies. Pixel opto-electromechanical characterization has been quantified experimentally on large scale arrays of micro mirrors and results are reported.

Citation Download Citation

Clara E. Dimas, Julie Perreault, Steven Cornelissen, Harold Dyson, Peter Krulevitch, Paul Bierden, and Thomas Bifano "Large-scale polysilicon surface-micromachined spatial light modulator", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.477932

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