New techniques for laser micromachining MEMS devices

Charles Abbott; Ric M. Allott; Bob Bann; Karl L. Boehlen; Malcolm C. Gower; Phil T. Rumsby; Ines Stassen Boehlen; Neil Sykes

doi:10.1117/12.482096

13 September 2002 New techniques for laser micromachining MEMS devices

Charles Abbott, Ric M. Allott, Bob Bann, Karl L. Boehlen, Malcolm C. Gower, Phil T. Rumsby, Ines Stassen Boehlen, Neil Sykes

Author Affiliations +

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482096
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown.

Citation Download Citation

Charles Abbott, Ric M. Allott, Bob Bann, Karl L. Boehlen, Malcolm C. Gower, Phil T. Rumsby, Ines Stassen Boehlen, and Neil Sykes "New techniques for laser micromachining MEMS devices", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482096

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