Paper
13 September 2002 Tailored ablation processing of advanced materials by femtosecond laser pulse
Kazue Ozono, Tomohiro Imahoko, Minoru Obara
Author Affiliations +
Abstract
We have developed an automatic pulsewidth tunable femtosecond Ti:sapphire laser system that can generate an output of 50fs-1ps and sub-mJ/pulse at a repetition rate of 1 kpps. The automatic pulse compressor enables on to control the pulsewidth in the range of 50fs-1ps by the use of a personal computer (PC). We describe our recent results of tailored ablation processing of advanced functional materials such as GaN, BN, and hydroxyapatite. By use of the femtosecond laser pulse tailored for a specific material, we have demonstrated precise processing without chemical composition change and heat affected zone.
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Kazue Ozono, Tomohiro Imahoko, and Minoru Obara "Tailored ablation processing of advanced materials by femtosecond laser pulse", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482105
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KEYWORDS
Laser ablation

Femtosecond phenomena

Gallium nitride

Etching

Pulsed laser operation

Sapphire lasers

Gallium

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