UV-LIGA microfabrication of a power relay based on electrostatic actuation

Ren Yang; Seok Jae Jeong; Wanjun Wang

doi:10.1117/12.478171

16 January 2003 UV-LIGA microfabrication of a power relay based on electrostatic actuation

Ren Yang, Seok Jae Jeong, Wanjun Wang

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.478171
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A novel type of micro power relay has been designed and fabricated using UV-LIGA technology. The relay is based on electrostatic actuation and SU-8 was used as a functional material. The unique character of this novel power relay is that other than a SU-8 structure used both as an electrical insulator and a mechanical connector, all other components are made of metal or alloys. Because UV-LIGA technology has the advantages of broad material selection and the capability of making high aspect ratio microstructures, the technology is best suited for fabricating microelectromechanical power relays. A multi-step, multi-layer UV-LIGA process has been successfully developed and a prototype relay has been successfully fabricated.

Citation Download Citation

Ren Yang, Seok Jae Jeong, and Wanjun Wang "UV-LIGA microfabrication of a power relay based on electrostatic actuation", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.478171

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