Application of phase shifting technique for SEM scanning moire method in MEMS

HaiXia Shang; Huimin Xie; Fulong Dai

doi:10.1117/12.509793

29 April 2003 Application of phase shifting technique for SEM scanning moire method im MEMS

HaiXia Shang, Huimin Xie, Fulong Dai

Proceedings Volume 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002; (2003) https://doi.org/10.1117/12.509793
Event: Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, 2002, Beijing, China

Abstract

A new phase shifting SEM scanning moire method is proposed in this paper. The phase shifting technique is realized in four steps from 0 to 2 π by shifting electron beam in y-axis direction controlled by SEM system. It is successfully applied to measure the virtual strain of a MEMS structure with grating of 5000 lines/mm. The experiments prove the technique can be widely used in meso-deformation measurement, and also show the sensitivity of experiments is highly improved after phase shifting technique. It provides a new way for disposal of fringes patterns in sub-micro moire method.

Citation Download Citation

HaiXia Shang, Huimin Xie, and Fulong Dai "Application of phase shifting technique for SEM scanning moire method im MEMS", Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); https://doi.org/10.1117/12.509793

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