Fabrication of holes and grooves on glass by a femtosecond laser

Yoshiro Ito; Kazunori Kuroi; Kazuhide Hayakawa

doi:10.1117/12.540501

18 November 2003 Fabrication of holes and grooves on glass by a femtosecond laser

Yoshiro Ito, Kazunori Kuroi, Kazuhide Hayakawa

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540501
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Holes and grooves of a few tens of micrometers have been fabricated on glass plates by femtosecond laser pulses in air. Shapes and surface morphology of the fabricated structures have been studied in detail by making their replicas. Details of the internal shape of the strictures formed have been studied by making replicas of them. Development of the shape of drilled hole with the increase in irradiated pulse number shows some distinguishable stages. Smaller number of pulses make channel at the center of rather flat bottom. With the increase of pulse number, the channel changed into conical, funnel-like shape as the depth increased. Shape of the groove depends on the scanning speed, i.e., number of irradiated pulses on the same position. The groove show little cracking or beaking with clear edges. Some amount of debris deposited along the groove but these debris were easily removed by smear. Inner surface of the groove has coarser morphology than that of the hole. Depth of the grove was shallower than that of the hole, even though the number of irradiated pulse was estimated to be equal.

Citation Download Citation

Yoshiro Ito, Kazunori Kuroi, and Kazuhide Hayakawa "Fabrication of holes and grooves on glass by a femtosecond laser", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540501

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KEYWORDS

Glasses

Femtosecond phenomena

Scanning electron microscopy

Microscopes

Laser drilling

Pulsed laser operation

Camera shutters

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