Simultaneous measurement of surface topology and material distribution by polarization detection

Seyed Mohammad Naghibi Saber; Werner Baetz; Wolfgang Holzapfel

doi:10.1117/12.501332

30 May 2003 Simultaneous measurement of surface topology and material distribution by polarization detection

Seyed Mohammad Naghibi Saber, Werner Baetz, Wolfgang Holzapfel

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.501332
Event: Optical Metrology, 2003, Munich, Germany

Abstract

We describe simultaneous determination of surface height profile and material distribution in the surface by imaging polarization detection. Starting from the single-beam case, the measurement principle based on the Stokes-Mueller formalism is deduced. This algorithm implies waviness detection of smooth as well as of rough surfaces. The basic concept of an imaging ellipsometer and its system configuration are discussed in the Stokes-Mueller formalism. Measuring the local slopes of the surface applying Fresnel's equations, the height image is deduced. Furthermore the imaging ellipsometer delivers the local complex refractive index from which the image of material distribution can be derived by a look-up table.

Citation Download Citation

Seyed Mohammad Naghibi Saber, Werner Baetz, and Wolfgang Holzapfel "Simultaneous measurement of surface topology and material distribution by polarization detection", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.501332

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available