Paper
9 September 2004 Fabrication of dielectric optical waveguides on AlTiC sliders for heat-assisted magnetic recording
Christophe Mihalcea, Kelman Pelhos, Tim Rausch, Chubing Peng, W.A. Challener, Edward C. Gage, Keith R. Mountfield, Michael A. Seigler
Author Affiliations +
Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.556006
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States
Abstract
In this paper we describe the fabrication of dielectric optical tantala and titania waveguides on AlTiC sliders.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christophe Mihalcea, Kelman Pelhos, Tim Rausch, Chubing Peng, W.A. Challener, Edward C. Gage, Keith R. Mountfield, and Michael A. Seigler "Fabrication of dielectric optical waveguides on AlTiC sliders for heat-assisted magnetic recording", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); https://doi.org/10.1117/12.556006
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Waveguides

Magnetism

Tantalum

Head

Cladding

Plasma enhanced chemical vapor deposition

Dielectrics

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