Fabrication of integrated lens pair test device

Mark Mackenzie; Chee Yee Kwok; G. D. Peng

doi:10.1117/12.582391

28 February 2005 Fabrication of integrated lens pair test device

Mark Mackenzie, Chee Yee Kwok, G. D. Peng

Proceedings Volume 5649, Smart Structures, Devices, and Systems II; (2005) https://doi.org/10.1117/12.582391
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

A silica microlens has been proposed which can be integrated with planar optical waveguide circuits. In order to fabricate the microlens, two deep silica etches must be performed. RIE is the prefered process as under certain conditions it is anisotropic. This paper reports on a study of different masking materials and plasma etch conditions trialed for the deep silica etch.

Citation Download Citation

Mark Mackenzie, Chee Yee Kwok, and G. D. Peng "Fabrication of integrated lens pair test device", Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); https://doi.org/10.1117/12.582391

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