Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide

Lukasz Nieradko; Christophe Gorecki; Andrei Sabac; Jean Claude Jeannot

doi:10.1117/12.468517

15 April 2003 Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide

Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, Jean Claude Jeannot

Proceedings Volume 4943, Fiber-based Component Fabrication, Testing, and Connectorization; (2003) https://doi.org/10.1117/12.468517
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

In this article we present a new micromachined platform for coupling the optical fibers to waveguides of Mach-Zehnder interferometers, supporting fibers in the same wafer as a waveguide wafer. Using standard CMOS technologies, like a UV photolithography, KOH wet etching of Si(100) wafer, sputtering of metal layers, RIE etching the fabrication of a very precise platform is demonstrated.

Citation Download Citation

Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, and Jean Claude Jeannot "Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide", Proc. SPIE 4943, Fiber-based Component Fabrication, Testing, and Connectorization, (15 April 2003); https://doi.org/10.1117/12.468517

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