Generation of nanosized materials by processing of thin film by interfering femtosecond laser beams

Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda

doi:10.1117/12.596774

8 October 2004 Generation of nanosized materials by processing of thin film by interfering femtosecond laser beams

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596774
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Nano-sized materials such as nanobump, nanomesh, nanobelt were generated by thin film processing using interfering femtosecond laser beams. To split and interfere femtosecond laser, a demagnification system, with a cylindrical lens in some case, was used. With four interfering femtosecond laser beams, a nanobump array was generated from a gold thin film in a single shot. It became larger and a bead was formed at a top of a bump as the fs laser fluence increased. Moreover, with three or two interfering femtosecond laser beams, ellipsoidal or linear nanobump array was generated. As an application of nanobump array, field emission from a nanobump array was demonstrated for the first time. On the other hand, with higher fluence and four beams, nanohole array was generated, and nanomesh was also generated from nanohole array by scratching. Grating was also generated with two beams, and nanobelt was generated from grating by scratching. Bimetallic nanobelt was generated from multi-layered thin film.

Citation Download Citation

Yoshiki Nakata, Tatsuo Okada, and Mitsuo Maeda "Generation of nanosized materials by processing of thin film by interfering femtosecond laser beams", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596774

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