Laser micromachining of ultraviolet and infrared simultaneous irradiation

Akihiro Kai; Yoshiyuki Kawamura

doi:10.1117/12.596550

8 October 2004 Laser micromachining of ultraviolet and infrared simultaneous irradiation

Akihiro Kai, Yoshiyuki Kawamura

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596550
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

In this study, three-dimensional microstructures are manufactured using a laser micro machining system, which consists of an ultraviolet pulsed laser and a stage having five degree of freedom. The works are controlled to move by the five-axis micro machining system to an arbitrary position, and three-dimensional microstructures can be manufactured. We have succeeded in machining a micro gear, a micro windmill and a micro globe made of polyamide resin by this system. We were machined a conic shape to study a precision limit of this system. We have succeeded in machining a conic tip having radius of curvature less than 1 μm by use of this system. In order to try improving the laser machining characteristics, we have modified the optical system in order to irradiated materials with fourth harmonics and fundamentals of an Nd-YAG laser, simultaneously. We had observed decrease of debris by simultaneous irradiation of the UV-laser and the IR-laser.

Citation Download Citation

Akihiro Kai and Yoshiyuki Kawamura "Laser micromachining of ultraviolet and infrared simultaneous irradiation", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596550

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