Actively controlled diffraction grating interferometer MEMS devices

Byungki Kim; Michael C. Schmittdiel; F. Levent Degertekin; Thomas R. Kurfess

doi:10.1117/12.592215

22 January 2005 Actively controlled diffraction grating interferometer MEMS devices

Byungki Kim, Michael C. Schmittdiel, F. Levent Degertekin, Thomas R. Kurfess

Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005) https://doi.org/10.1117/12.592215
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

A micrograting interferometer has been fabricated to use in measuring the static and dynamic performance of MEMS devices. These measurements aid in qualifying the functionality of fabricated MEMS devices, as well as improving fabrication techniques. The metrology system uses a phase sensitive diffraction grating for interferometric axial resolution and a microfabricated lens for improved lateral resolution. In addition, active control is applied to the system to reduce the impact of mechanical vibrations and insure a high degree of measurement sensitivity. The control scheme is demonstrated successfully in the scanning of MEMS devices in the experiment. A deformable grating, which controls measurement sensitivity, has been fabricated and integrated with optoelectronics in small volume. Experiments with the integrated package demonstrate that the measurement sensitivity can be adjusted by actuating the deformable grating. This integrated single device illustrates that the deformable grating sensor can be expanded to form arrays for parallel measurement of MEMS device.

Citation Download Citation

Byungki Kim, Michael C. Schmittdiel, F. Levent Degertekin, and Thomas R. Kurfess "Actively controlled diffraction grating interferometer MEMS devices", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); https://doi.org/10.1117/12.592215

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