A three-dimensional precision platform based on vertical scanning and its application in surface topography measurement

Yurong Chen; Xudong Yang; Tiebang Xie

doi:10.1117/12.716172

13 October 2006 A three-dimensional precision platform based on vertical scanning and its application in surface topography measurement

Yurong Chen, Xudong Yang, Tiebang Xie

Author Affiliations +

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62801X (2006) https://doi.org/10.1117/12.716172
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

The measurement and characterization of three-dimensional surface topography is representative of a primary development direction of surface metrology. This paper presents a three-dimensional precision platform based on vertical scanning that has practical application in surface topography measurement. The three-dimensional precision platform is composed of a two-dimensional platform with metrology system and a vertical scanning platform. The vertical scanning platform is laid on the two-dimensional platform with metrology system. When the workpiece is measured, the closed loop control system controls the two-dimensional platform. Meanwhile, the Z direction servo motor and the piezoelectric actuator drive the vertical scanning platform to move vertically to realize the coarse and fine displacement. The diffraction grating displacement sensor detects the vertical relative displacement. So the precision positioning in X-Y direction is obtained and the vertical scanning in Z direction is realized during the surface topography measurement. The three-dimensional precision platform based on vertical scanning developed in this paper, as one of the key techniques, is the technique foundations for development of the improved contact or noncontact three-dimensional topography profilometers.

Citation Download Citation

Yurong Chen, Xudong Yang, and Tiebang Xie "A three-dimensional precision platform based on vertical scanning and its application in surface topography measurement", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801X (13 October 2006); https://doi.org/10.1117/12.716172

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