Design and development of 3-bit polymer MEMS phase shifters

Hargsoon Yoon; Taeksoo Ji; Vijay K. Varadan

doi:10.1117/12.608127

16 May 2005 Design and development of 3-bit polymer MEMS phase shifters

Hargsoon Yoon, Taeksoo Ji, Vijay K. Varadan

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.608127
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

This paper presents the design and development of 3-bit polymer MEMS phase shifters for wireless communication applications. Polymer membrane and ferroelectric (barium strontium titanate) thin film on silicon substrates are employed for device fabrication. BI-CPW design and fabrication processes of ferroelectric and polymer materials compatible with current silicon technology are investigated. Mechanical operation with low DC bias voltage and scattering parameters of a polymer MEMS switch and phase delay lines are measured. The small size and low pull down voltage demonstrated in this research are promising characteristics for commercial applications of 3-bit polymer MEMS phase shifters with low cost.

Citation Download Citation

Hargsoon Yoon, Taeksoo Ji, and Vijay K. Varadan "Design and development of 3-bit polymer MEMS phase shifters", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.608127

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