Heat-treating effect on the properties of Pb1-xLax(Zr0.4Ti0.6)O3 ferroelectric thin film prepared by a modified sol-gel process

Fuwen Shi; Genshui Wang; Xiangjian Meng; Jinglan Sun; Jun-Hao Chu

doi:10.1117/12.607555

8 December 2004 Heat-treating effect on the properties of Pb_1-xLa_x(Zr_0.4Ti_0.6)O₃ ferroelectric thin film prepared by a modified sol-gel process

Fuwen Shi, Genshui Wang, Xiangjian Meng, Jinglan Sun, Jun-Hao Chu

Author Affiliations +

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607555
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

2 mol% Lanthanum doped lead zirconate titanate Pb(Zr_0.4Ti _0.6)O₃ ferroelectric thin film were successfully deposited by a modified sol-gel method on(111) Pt/Ti/SiO₂/Si(100) substrate, the effect of heat-treatment on the properties of microstructure and ferroelectric was investigated. It is shown that deposited on (111)Pt lead to (111) preferred orientation. The PLZT thin film annealing at 700°C show good ferroelctric properties with a large remnant polarization of 40μ C/cm₂, a spontaneous polarization of 75.7μ C/cm₂, and a coercive field of 112kV/cm under an electric field of 650kV/cm. The dielectric constant increased with annealing temperature.

Citation Download Citation

Fuwen Shi, Genshui Wang, Xiangjian Meng, Jinglan Sun, and Jun-Hao Chu "Heat-treating effect on the properties of Pb_1-xLa_x(Zr_0.4Ti_0.6)O₃ ferroelectric thin film prepared by a modified sol-gel process", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607555

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available