Site conditions for high resolution surface analytical systems and environmental influence on instrument performance

Bernd Guenther; A. Feltz; T. Berghaus; A. Bettac

doi:10.1117/12.617365

18 August 2005 Site conditions for high resolution surface analytical systems and environmental influence on instrument performance

Bernd Guenther, A. Feltz, T. Berghaus, A. Bettac

Author Affiliations +

Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 593302 (2005) https://doi.org/10.1117/12.617365
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The increasing performance of high resolution surface analytical instruments, in the nanometer range, requires suitable site conditions, in order to achieve the design performance specifications. Due to our practical experience in selling these instruments over the last twenty years we have established a well defined procedure, which is used for the characterisation of new instruments, as well as for the assessment of customer site conditions.

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Bernd Guenther, A. Feltz, T. Berghaus, and A. Bettac "Site conditions for high resolution surface analytical systems and environmental influence on instrument performance", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 593302 (18 August 2005); https://doi.org/10.1117/12.617365

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