Knowledge-based process simulation and design system for MEMS

J. Popp; T. Schmidt; A. Wagener; K. Hahn; R. Brück; A. Hössinger

doi:10.1117/12.638483

5 January 2006 Knowledge-based process simulation and design system for MEMS

J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6035, Microelectronics: Design, Technology, and Packaging II; 603512 (2006) https://doi.org/10.1117/12.638483
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process design, simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures.

Citation Download Citation

J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, and A. Hössinger "Knowledge-based process simulation and design system for MEMS", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603512 (5 January 2006); https://doi.org/10.1117/12.638483

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