Design and use of multivariate approach error analysis APC system

Jean de Caunes; Joost van Herk; Scott Warrick; Bertrand Le Gratiet; Marc Mikolajczak; Jean-Damien Chapon; Cedric Monget; Jan-Willem Gemmink

doi:10.1117/12.657177

14 March 2006 Design and use of multivariate approach error analysis APC system

Jean de Caunes, Joost van Herk, Scott Warrick, Bertrand Le Gratiet, Marc Mikolajczak, Jean-Damien Chapon, Cedric Monget, Jan-Willem Gemmink

Author Affiliations +

Proceedings Volume 6155, Data Analysis and Modeling for Process Control III; 615507 (2006) https://doi.org/10.1117/12.657177
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

On-going complex integration schemes and developments in processes present significant challenges to lithography in manufacturing advanced semiconductor integrated circuits. Although APC solutions are in place to assist in achieving robust CD control and overlay, there is a great need to increase the 'knowledge' of the system with respect to other contributors impacting the process. The problem becomes more complex in case of an ASIC Prototyping Fab where there is no big runner concept. This leads to the need of a product effect management requirement (Product layout and reticles impact). For this reason, we developed the multivariate R2R controller. This paper discusses the multi-variant methodology and results of a new R2R regulation algorithm in a 65nm node process. Specifically, parameters such as linear combinations of terms, alignment variation for overlay modeled parameters (inter-field / intra-field), CD impacts (reticles, process, tool, STI stack etc) are studied. New solutions for future technology nodes are presented in this paper. It includes for each contributor a multivariate method to assess vector responses and noise contribution. This is being applied on CD and Overlay measurement feedback. For each source of variation (or "Contributor"), the multivariate controller provides the estimated level of compensation requested to meet the target and the level of noise induced on lot processing. At the moment the multivariate R2R controller runs in production. A real evaluation of the existing sources of variations and noise is possible and demonstrated. The result is a significant regulation performance improvement.

Citation Download Citation

Jean de Caunes, Joost van Herk, Scott Warrick, Bertrand Le Gratiet, Marc Mikolajczak, Jean-Damien Chapon, Cedric Monget, and Jan-Willem Gemmink "Design and use of multivariate approach error analysis APC system", Proc. SPIE 6155, Data Analysis and Modeling for Process Control III, 615507 (14 March 2006); https://doi.org/10.1117/12.657177

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