Silicon-based micro and subwavelength optical elements and applications

Jenq-Yang Chang; Che-Lung Hsu; Chih-Ming Wang; Mount-Learn Wu; Hsiao-Chin Lan; Yun-Chih Lee; Ya-Lun Tsai; Yung-Chih Liu; Tsung-Hsun Yang; Sheng-Han Tu

doi:10.1117/12.683275

18 September 2006 Silicon-based micro and subwavelength optical elements and applications

Jenq-Yang Chang, Che-Lung Hsu, Chih-Ming Wang, Mount-Learn Wu, Hsiao-Chin Lan, Yun-Chih Lee, Ya-Lun Tsai, Yung-Chih Liu, Tsung-Hsun Yang, Sheng-Han Tu

Author Affiliations +

Proceedings Volume 6310, Photonic Devices and Algorithms for Computing VIII; 63100D (2006) https://doi.org/10.1117/12.683275
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

In this paper, silicon-based micro and subwavelength optical elements based on a free-standing silicon nitride (SiN_x) membrane are achieved. These elements, including gratings, microlenses, and holographic optical elements (HOEs), are designed and used within the visible and infrared regions. These devices can be used as collimators, reflectors, and wavelength-dependent filters with advantages of simple structure, high efficiency and feasibility to integrate with other elements into a micro-system chip. In order to demonstrate the advantage of micro-optics of free-standing SiN_x membrane type in integration, a miniaturized optical pickup head module based on a stacked micro-optical system is developed. This module consisted of a laser diode, a reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. The novel microoptical system can overcome the problems encountered in other microoptical systems such as off-axis aberration, lower optical efficiency or durability, integration and even in fabrication. A focal spot with a FWHM diameter of 3.3 μm is obtained while the diffraction limited full-width at half-maximum (FWHM) is 0.7 μm. To extend the advantage of micro-optics of free-standing SiNx membrane, the subwavelength optical elements base on guided-mode resonance is also developed. With various Si-based structures, the filter possesses numerous properties such as variable bandwidths, low sideband, flattop, and etc. They are also applied as biosensors to detect the hybridization process of bio reaction for their high sensitivity. The results show that micro and subwavelength optical elements fabricated on Si-based material will be a candidate for emerging silicon micro-photonics.

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Jenq-Yang Chang, Che-Lung Hsu, Chih-Ming Wang, Mount-Learn Wu, Hsiao-Chin Lan, Yun-Chih Lee, Ya-Lun Tsai, Yung-Chih Liu, Tsung-Hsun Yang, and Sheng-Han Tu "Silicon-based micro and subwavelength optical elements and applications", Proc. SPIE 6310, Photonic Devices and Algorithms for Computing VIII, 63100D (18 September 2006); https://doi.org/10.1117/12.683275

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