In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode

Alain Bosseboeuf; Cedric Bréluzeau; Fabien Parrain; Philippe Coste; Jean-Paul Gilles; Souhil Megherbi; Xavier Le Roux

doi:10.1117/12.693067

21 June 2006 In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode

Alain Bosseboeuf, Cedric Bréluzeau, Fabien Parrain, Philippe Coste, Jean-Paul Gilles, Souhil Megherbi, Xavier Le Roux

Proceedings Volume 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; 63451D (2006) https://doi.org/10.1117/12.693067
Event: Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2006, Ancona, Italy

Abstract

The knife-edge technique in reflection mode is an alternative method for the characterization of in-plane motion and vibrations of microdevices. In this paper, we investigate this technique for sinusoidal vibration measurements of microresonators. First, we examine theoretically the effect of light reflection on the non moving substrate. It is shown that it has a significant effect on the sensitivity of the knife-edge technique to in-plane vibrations and that it introduces a slight sensitivity to out-of-plane vibrations. Then we demonstrate in-plane resonance measurements with a resolution in the nanometer range in the unfavourable case of a polysilicon resonator on a polysilicon coated substrate. Finally advantages, limitations and calibration issues of this technique are discussed.

Citation Download Citation

Alain Bosseboeuf, Cedric Bréluzeau, Fabien Parrain, Philippe Coste, Jean-Paul Gilles, Souhil Megherbi, and Xavier Le Roux "In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode", Proc. SPIE 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 63451D (21 June 2006); https://doi.org/10.1117/12.693067

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