Etched Mirror Corner Bend For Semiconductor Optical Circuits.

T. M. Benson

doi:10.1117/12.938133

3 November 1986 Etched Mirror Corner Bend For Semiconductor Optical Circuits.

T. M. Benson

Proceedings Volume 0651, Integrated Optical Circuit Engineering III; (1986) https://doi.org/10.1117/12.938133
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Guided wave structures with directional changes will undoubtedly be required for integrated optical circuits. Reflections off an etched vertical wall are used to provide promising low loss bends.

Citation Download Citation

T. M. Benson "Etched Mirror Corner Bend For Semiconductor Optical Circuits.", Proc. SPIE 0651, Integrated Optical Circuit Engineering III, (3 November 1986); https://doi.org/10.1117/12.938133

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