Results from a new die-to-database reticle inspection platform

William Broadbent; Yalin Xiong; Michael Giusti; Robert Walsh; Aditya Dayal

doi:10.1117/12.712367

5 April 2007 Results from a new die-to-database reticle inspection platform

William Broadbent, Yalin Xiong, Michael Giusti, Robert Walsh, Aditya Dayal

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 65182I (2007) https://doi.org/10.1117/12.712367
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

A new die-to-database high-resolution reticle defect inspection system has been developed for the 45nm logic node and extendable to the 32nm node (also the comparable memory nodes). These nodes will use predominantly 193nm immersion lithography although EUV may also be used. According to recent surveys, the predominant reticle types for the 45nm node are 6% simple tri-tone and COG. Other advanced reticle types may also be used for these nodes including: dark field alternating, Mask Enhancer, complex tri-tone, high transmission, CPL, EUV, etc. Finally, aggressive model based OPC will typically be used which will include many small structures such as jogs, serifs, and SRAF (sub-resolution assist features) with accompanying very small gaps between adjacent structures. The current generation of inspection systems is inadequate to meet these requirements. The architecture and performance of a new die-to-database inspection system is described. This new system is designed to inspect the aforementioned reticle types in die-to-database and die-to-die modes. Recent results from internal testing of the prototype systems are shown. The results include standard programmed defect test reticles and advanced 45nm and 32nm node reticles from industry sources. The results show high sensitivity and low false detections being achieved.

Citation Download Citation

William Broadbent, Yalin Xiong, Michael Giusti, Robert Walsh, and Aditya Dayal "Results from a new die-to-database reticle inspection platform", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65182I (5 April 2007); https://doi.org/10.1117/12.712367

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