Excimer laser micromachining

Konstantin E. Lapshin; Alexey Z. Obidin; Sergey K. Vartapetov

doi:10.1117/12.729649

25 April 2007 Excimer laser micromachining

Konstantin E. Lapshin, Alexey Z. Obidin, Sergey K. Vartapetov

Proceedings Volume 6606, Advanced Laser Technologies 2006; 66060V (2007) https://doi.org/10.1117/12.729649
Event: Advanced Laser Technologies 2006, 2006, Brasov, Romania

Abstract

Wavelength, pulse energy, repetition rate of excimer lasers as well as beam profile and beam delivery system are highly important parameters for precision machining. In this paper we report features of our excimer lasers and excimer laser systems that have been designed for micromachining. The examples of treatment of different materials are presented. In particular, we provide some new results of microstructuring of the surface of fused silica and also formation of up to 10 mm long microchannels with extremely high aspect ratio. We discovered some liquid forming under certain circumstances due to drilling of microchannels in PMMA. This liquid remains unchanged in the microchannels after the treatment.

Citation Download Citation

Konstantin E. Lapshin, Alexey Z. Obidin, and Sergey K. Vartapetov "Excimer laser micromachining", Proc. SPIE 6606, Advanced Laser Technologies 2006, 66060V (25 April 2007); https://doi.org/10.1117/12.729649

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