Cleaning of ITO glass with carbon dioxide snow jet spray

Jun-jian Li; Tong Qi; Shu-lin Li; Guang Zhao

doi:10.1117/12.783731

14 November 2007 Cleaning of ITO glass with carbon dioxide snow jet spray

Jun-jian Li, Tong Qi, Shu-lin Li, Guang Zhao

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67224I (2007) https://doi.org/10.1117/12.783731
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

ITO glass cleaning is LCD, OLED and other flat panel display industry's key technologies. At present, the usual wet cleaning technology consumes large amount of water and chemicals, and produces a large amount of contaminant venting. CO₂ snow jet spray cleaning has been successfully applied to cleaning the surface of semiconductor chip, vacuum devices and space telescopes. Surface cleaning of indium tin oxide (ITO) film was carried out with carbon dioxide snow jet treatment .Based on the measurements of the contact angles, X-ray photoelectron spectroscopy and scanning electron microscopy (SEM) ,the influence of carbon dioxide snow jet treatment on surface cleaning of indium tin Oxide film was investigated and compared with the samples of low frequency immersion ultrasonic cleaning. Experimental data show that the carbon dioxide snow jet treatment effectively removes particulate and hydrocarbon on ITO surface.

Citation Download Citation

Jun-jian Li, Tong Qi, Shu-lin Li, and Guang Zhao "Cleaning of ITO glass with carbon dioxide snow jet spray", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67224I (14 November 2007); https://doi.org/10.1117/12.783731

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