Analysis and optimization for effective diffraction area of grating movable light modulator

Lei Han; Shanglian Huang; Zhihai Zhang; Jie Zhang; Xu Yan

doi:10.1117/12.782501

19 November 2007 Analysis and optimization for effective diffraction area of grating movable light modulator

Lei Han, Shanglian Huang, Zhihai Zhang, Jie Zhang, Xu Yan

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67240C (2007) https://doi.org/10.1117/12.782501
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

GMLM (Grating Movable Light Modulator)is a novel light modulator based on MOEMS technology which can be used in fields of display and print. But present design has only 30% effective diffraction area, which can deeply influence the key parameters such as pixel-filling-ratio and contrast. An electromechanical model of the device was established, and the effective spring constant of GMLM was deduced by energy method. According to that the relation between structure parameters and effective diffraction area was analyzed theoretically. Then optimized structures were simulated and validated by FEM software Coveter Ware. Simulation data shows that the optimization device model can enhance the effective diffraction area to about 90% from less than 30% before optimization.

Citation Download Citation

Lei Han, Shanglian Huang, Zhihai Zhang, Jie Zhang, and Xu Yan "Analysis and optimization for effective diffraction area of grating movable light modulator", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240C (19 November 2007); https://doi.org/10.1117/12.782501

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KEYWORDS

Diffraction

Diffraction gratings

Optimization (mathematics)

Electrodes

Modulators

Instrument modeling

Data modeling

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