System-level modeling and verification of a micro pitch-tunable grating

Xianglian Lv; Yang He; Weizheng Yuan

doi:10.1117/12.867038

22 October 2010 System-level modeling and verification of a micro pitch-tunable grating

Xianglian Lv, Yang He, Weizheng Yuan

Proceedings Volume 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 76571M (2010) https://doi.org/10.1117/12.867038
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Micro Pitch-tunable Grating based on microeletromechanical systems(MEMS) technology can modulate the grating period dynamically by controlling the drive voltage. The device is so complex that it is impossible to model and sumulation by FEA method or only analysis macromodel. In this paper, a new hybrid system-level modeling method was presented. Firstly the grating was decomposed into function components such as grating beam, supporting beam, electrostatic comb-driver. Block Arnoldi algorithm was used to obtain the numerical macromodel of the grating beams and supporting beams, the analytical macromodels called multi-port-elements(MPEs) of the comb-driver and other parts were also established, and the elements were connected together to form hybrid network for representing the systemlevel models of the grating in MEME Garden, which is a MEMS CAD tool developed by Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University. Both frequency and time domain simulation were implemented. The grating was fabricated using silicon-on-glass(SOG) process. The measured working displacement is 16.5μm at a driving voltage of 40V. The simulation result is 17.6μm which shows an acceptable agreement with the measurement result within the error tolerance of 6.7%. The method proposed in this paper can solve the voltage-displacement simulation problem of this kind of complex grating. It can also be adapted to similar MEMS/MOEMS devices simulations.

Citation Download Citation

Xianglian Lv, Yang He, and Weizheng Yuan "System-level modeling and verification of a micro pitch-tunable grating", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571M (22 October 2010); https://doi.org/10.1117/12.867038

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KEYWORDS

Computer aided design

Microelectromechanical systems

Electromechanical design

Modeling and simulation

Diffraction gratings

Finite element methods

Computer simulations

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