Si wire waveguide devices

T. Watanabe D.V.M.; K. Yamada; T. Tsuchizawa; H. Fukuda; H. Shinojima; S. Itabashi

doi:10.1117/12.733512

10 September 2007 Si wire waveguide devices

T. Watanabe D.V.M., K. Yamada, T. Tsuchizawa, H. Fukuda, H. Shinojima, S. Itabashi

Proceedings Volume 6775, Active and Passive Optical Components for Communications VII; 67750K (2007) https://doi.org/10.1117/12.733512
Event: Optics East, 2007, Boston, MA, United States

Abstract

This paper presents our recent progress in the development of a Si wire waveguiding system for microphotonics devices. We have developed function devices that integrate several fundamental components and confirmed that they exhibited excellent characteristics due to the accuracy of the Si microfabrication. The propagation loss of the waveguide is less than 1.2dB/cm, and branching devices and basic filters show good characteristics. Using the fundamental microfabrication technique, we have developed other passive and dynamic functional devices. As an example of our recent advances using passive devices, we present a polarization diversity system consisting of a separator and a rotator. As a component of a dynamic functional device, we show a low-loss rib-type silicon wire waveguide with low-impedance p-i-n structure and its optical attenuation characteristics.

Citation Download Citation

T. Watanabe D.V.M., K. Yamada, T. Tsuchizawa, H. Fukuda, H. Shinojima, and S. Itabashi "Si wire waveguide devices", Proc. SPIE 6775, Active and Passive Optical Components for Communications VII, 67750K (10 September 2007); https://doi.org/10.1117/12.733512

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