Paper
26 October 2007 Analysis and design of a MEMS micromirror optical switch
Rashmi Bahuguna, Banmali S. Rawat, Steffen Kurth, Thomas Gessner, Moncef B. Tayahi
Author Affiliations +
Proceedings Volume 6796, Photonics North 2007; 67962N (2007) https://doi.org/10.1117/12.779117
Event: Photonics North 2007, 2007, Ottawa, Canada
Abstract
An optical switch based on micro electro mechanical systems (MEMS) technology has been analyzed and designed. In the proposed switch the collimating lenses as commonly used in MEMS switches have been eliminated thus making the switch smaller in size. The switch characteristics based on theoretical analysis and experimental results have been compared.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rashmi Bahuguna, Banmali S. Rawat, Steffen Kurth, Thomas Gessner, and Moncef B. Tayahi "Analysis and design of a MEMS micromirror optical switch", Proc. SPIE 6796, Photonics North 2007, 67962N (26 October 2007); https://doi.org/10.1117/12.779117
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KEYWORDS
Switches

Micromirrors

Microelectromechanical systems

Mirrors

Optical switching

Silicon

Lenses

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