An optical scanner based on cantilever-type electrostatic zipping actuators

Smitha M. N. Rao; Praveen Pandojirao-Sunkojirao; Naresh Dhaubanjar; Mu Chiao; J.-C. Chiao

doi:10.1117/12.767801

4 January 2008 An optical scanner based on cantilever-type electrostatic zipping actuators

Smitha M. N. Rao, Praveen Pandojirao-Sunkojirao, Naresh Dhaubanjar, Mu Chiao, J.-C. Chiao

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 683617 (2008) https://doi.org/10.1117/12.767801
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

This paper discusses modeling, design, fabrication and characterization of an optical scanner based on cantilever-type electrostatic zipping actuators. The electrostatic actuator has been designed to achieve high displacements for large optical scanning angles at lower actuation voltages. The zipping actuators are fabricated using multi-layer polysilicon foundry fabrication processes. The electrostatic force between the cantilever and the bottom electrode on the substrate pulls the cantilever down. With a warped cantilever, the force closes the gap from the anchored end and gradually the zipping effect actuates the entire cantilever. In our design, mechanical structures are arranged to avoid electrical shortcircuit. With various annealing temperatures, the warped angles are controllable. The cantilever serves as a reflective surface and the high out-of-plane displacement is used to steer a reflected laser beam for imaging and scanning applications. In this paper we present the design considerations in electrostatic zipping actuator displacement and control as well as the arrangement for optical scanning.

Citation Download Citation

Smitha M. N. Rao, Praveen Pandojirao-Sunkojirao, Naresh Dhaubanjar, Mu Chiao, and J.-C. Chiao "An optical scanner based on cantilever-type electrostatic zipping actuators", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683617 (4 January 2008); https://doi.org/10.1117/12.767801

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available