Development of a simple user-friendly commercial digital holographic microscope

Oi Choo Chee; Vijay Raj Singh; Eddy Sim; Anand Asundi

doi:10.1117/12.760625

25 January 2008 Development of a simple user-friendly commercial digital holographic microscope

Oi Choo Chee, Vijay Raj Singh, Eddy Sim, Anand Asundi

Proceedings Volume 6912, Practical Holography XXII: Materials and Applications; 69120V (2008) https://doi.org/10.1117/12.760625
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

We report the development of a simple commercial digital holographic microscope. The hologram is recorded using a CCD sensor and numerically reconstructed to provide quantitative analysis of the object. The laser source is coupled via fibre optics and the opto-mechanical setup is flexible and customizable for either the reflection or transmission mode. The user-friendly software allows live reconstruction, simultaneously providing both the amplitude and phase images. System performance is improved with phase unwrapping and interferometric comparison. Additional features include various image enhancements, cross-sectional and line profiling, measurement and data analysis tools for quantitative 3D imaging and surface topography measurement. The performance of the product is tested on different micro devices, glass and silicon surfaces.

Citation Download Citation

Oi Choo Chee, Vijay Raj Singh, Eddy Sim, and Anand Asundi "Development of a simple user-friendly commercial digital holographic microscope", Proc. SPIE 6912, Practical Holography XXII: Materials and Applications, 69120V (25 January 2008); https://doi.org/10.1117/12.760625

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