Optical and structural properties of Sb and Sb-rich SiSb thin films

Huan Huang; Yang Wang; Fuxi Gan

doi:10.1117/12.823427

19 March 2009 Optical and structural properties of Sb and Sb-rich SiSb thin films

Huan Huang, Yang Wang, Fuxi Gan

Proceedings Volume 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage; 71251V (2009) https://doi.org/10.1117/12.823427
Event: Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 2008, Wuhan, China

Abstract

Sb-rich SiSb thin film was recently reported as a promising phase change meromy material. In this paper, optical and structural properties of as-deposited amouphous and laser-annealed crystalline Sb-rich SiSb thin films are studied and compared with pure Sb thin film. Sb and Si₁₅Sb₈₅ thin films were deposited on polycarbonate substrates by magnetron sputtering. Laser initialization in pure Sb and Si₁₅Sb₈₅thin films were performed with phase-change optical disc initializer. Reflectivity Spectrum and XRD analysis were performed on as-deposited and initialized Sb and Si₁₅Sb₈₅ thin films. The influence of Si doping on its optical and structural properties are discussed and qualitatively explained by a distorted structure model.

Citation Download Citation

Huan Huang, Yang Wang, and Fuxi Gan "Optical and structural properties of Sb and Sb-rich SiSb thin films", Proc. SPIE 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 71251V (19 March 2009); https://doi.org/10.1117/12.823427

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