Long-term reliability measurements on MEMS using a laser-Doppler vibrometer

J. De Coster; L. Haspeslagh; A. Witvrouw; I. De Wolf

doi:10.1117/12.814515

3 October 2008 Long-term reliability measurements on MEMS using a laser-Doppler vibrometer

J. De Coster, L. Haspeslagh, A. Witvrouw, I. De Wolf

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71550G (2008) https://doi.org/10.1117/12.814515
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

This paper describes how a standard laser-Doppler vibrometer (LDV) system was modified and extended for long-term reliability measurements on micro-electromechanical (MEMS) devices. Since scanning LDV measurements are performed by successively pointing a laser beam at a predefined set of locations, it is of the utmost importance that no movement of the MEMS device relative to the laser source occurs during the extended lifetime testing period. In the proposed system, the inevitable drift is compensated in three dimensions. The Z-drift is compensated by a piezo-actuated lens and an autofocus algorithm. The in-plane drift is detected using an image correlation technique, and the coordinate system of the LDV tool is modified accordingly. In this manner the scan points of the LDV can track the drift of the MEMS device. During a 400-hour testing period, measurements were performed every 15 minutes. A total in-plane drift of about 30μm was observed. The tracking error was below the resolving power of the microscope.

Citation Download Citation

J. De Coster, L. Haspeslagh, A. Witvrouw, and I. De Wolf "Long-term reliability measurements on MEMS using a laser-Doppler vibrometer", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550G (3 October 2008); https://doi.org/10.1117/12.814515

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