Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors

Arman Gasparyan; Vladimir A. Aksyuk; Paul A. Busch; Susanne Arney

doi:10.1117/12.395696

10 August 2000 Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors

Arman Gasparyan, Vladimir A. Aksyuk, Paul A. Busch, Susanne Arney

Proceedings Volume 4180, MEMS Reliability for Critical Applications; (2000) https://doi.org/10.1117/12.395696
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The Polytec^TM laser Doppler vibrometer was used to characterize the dynamics mechanical reliability and lifetimes of surface-micromachined self-assembling MEMS tilting mirrors. The mechanical modes of micromirror can be identified and corresponding resonance frequencies measured. It was found, for certain experimental conditions, that micromirror operation simulating contact between poly-Si surfaces may result in device lifetime reduction due to stiction at the point of contact. The appropriate modifications in device design eliminate the effect of stiction on device lifetime. Moreover, for up to 10⁹ mechanical cycles completed no friction-related device degradation has been observed. In controlled dry ambient at room temperature, micromirrors have been able to complete about 2x10¹⁰ switching operations without signs of mechanical degradation. The results validate the robustness and long term mechanical ability of evaluated micromirror devices.

Citation Download Citation

Arman Gasparyan, Vladimir A. Aksyuk, Paul A. Busch, and Susanne Arney "Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors", Proc. SPIE 4180, MEMS Reliability for Critical Applications, (10 August 2000); https://doi.org/10.1117/12.395696

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