A MEMS device for measuring laser power and spot size

Anjan Ghosh; Sagnik Pal

doi:10.1117/12.807342

26 January 2009 A MEMS device for measuring laser power and spot size

Anjan Ghosh, Sagnik Pal

Proceedings Volume 7222, Quantum Sensing and Nanophotonic Devices VI; 72220N (2009) https://doi.org/10.1117/12.807342
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

We propose a new method for using a MEMS device for measuring the power and spot size of a laser beam. The device consists of a doubly-clamped single crystal silicon micro-beam. A laser beam incident on the microstructure exerts an optical pressure on it and consequently the micro-beam gets strained. Analysis and simulations show that the laser power and spot size can be determined by measuring the strains at two different positions on the microstructure.

Citation Download Citation

Anjan Ghosh and Sagnik Pal "A MEMS device for measuring laser power and spot size", Proc. SPIE 7222, Quantum Sensing and Nanophotonic Devices VI, 72220N (26 January 2009); https://doi.org/10.1117/12.807342

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