Test of an off-axis asphere by subaperture stitching interferometry

Xiao-kun Wang; Li-gong Zheng; Bin-zhi Zhang; Rui-Gang Li; Di Fan; Wei-jie Deng; Xu Wang; Feng Zhang; Zhong-yu Zhang; Xue-jun Zhang

doi:10.1117/12.828716

20 May 2009 Test of an off-axis asphere by subaperture stitching interferometry

Xiao-kun Wang, Li-gong Zheng, Bin-zhi Zhang, Rui-Gang Li, Di Fan, Wei-jie Deng, Xu Wang, Feng Zhang, Zhong-yu Zhang, Xue-jun Zhang

Author Affiliations +

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72832J (2009) https://doi.org/10.1117/12.828716
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

A new method combined subaperture stitching with interferometry(SSI) is introduced. It can test large and off-axis aspheric surfaces without the aid of other null optics. In this paper the basic principle and theory of the technique are analyzed. The synthetical optimization stitching model and effective stitching algorithm are established based on homogeneous coordinates transformation and simultaneous least-squares method. The software of SSI is devised and the prototype for testing of large aspheres by SSI is designed and developed. An off-axis asphere with the aperture of 376mm×188mm is tested by this method. For comparison and validation, the asphere is also tested by null compensation.The synthesized surface profile is consistent to that ofthe entire surface from null test; and the difference of PV and RMS error between them is 0.047 λ and 0.006 λ, respectively. So it provides another quantitative measurement for testing large aspheric surfaces and off-axis aspheres besides null-compensation.

Citation Download Citation

Xiao-kun Wang, Li-gong Zheng, Bin-zhi Zhang, Rui-Gang Li, Di Fan, Wei-jie Deng, Xu Wang, Feng Zhang, Zhong-yu Zhang, and Xue-jun Zhang "Test of an off-axis asphere by subaperture stitching interferometry", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72832J (20 May 2009); https://doi.org/10.1117/12.828716

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