Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometry

Zixin Zhao; Hong Zhao; Feifei Gu; Lu Zhang

doi:10.1117/12.2020427

13 May 2013 Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometry

Zixin Zhao, Hong Zhao, Feifei Gu, Lu Zhang

Author Affiliations +

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87881B (2013) https://doi.org/10.1117/12.2020427
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

Sub-aperture stitching (SAS) testing method is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. However, the center of each sub-aperture could be in error because of the complex motion of the mechanical platform. To eliminate the affection of lateral location error in the final stitching result, a lateral location error compensation algorithm is introduced and the ability of the algorithm to compensate the lateral location error is analyzed. Finally, a 152.4mm concave parabolic mirror is tested using SAS method with the compensation algorithm. The result showed that the algorithm can effectively compensate the lateral location error caused by the mechanical motion. The proposal of the algorithm can reduce high requirement of mechanical platform, which provides a feasible method for the practical application of the engineering.

Citation Download Citation

Zixin Zhao, Hong Zhao, Feifei Gu, and Lu Zhang "Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometry", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87881B (13 May 2013); https://doi.org/10.1117/12.2020427

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