Advances in photonic MOEMS-MEMS device thinning and polishing

James J McAneny; Mark Kennedy; Tom McGroggan

doi:10.1117/12.842051

16 February 2010 Advances in photonic MOEMS-MEMS device thinning and polishing

James J McAneny, Mark Kennedy, Tom McGroggan

Proceedings Volume 7590, Micromachining and Microfabrication Process Technology XV; 75900G (2010) https://doi.org/10.1117/12.842051
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

As devices continue to increase in density and complexity, ever more stringent specifications are placed on the wafer scale equipment manufacturers to produce higher quality and higher output. This results in greater investment and more resource being diverted into producing tools and processes which can meet the latest demanding criteria. Substrate materials employed in the fabrication process range from Silicon through InP and include GaAs, InSb and other optical networking or waveguide materials. With this diversity of substrate materials presented, controlling the geometries and surfaces grows progressively more challenging. This article highlights the key parameters which require close monitoring and control in order to produce highly precise wafers as part of the fabrication process. Several as cut and commercially available standard polished wafer materials were used in empirical trials to test tooling options in generating high levels of geometric control over the dimensions while producing high quality surface finishes. Specific attention was given to the measurement and control of: flatness; parallelism/TTV; surface roughness and final target thickness as common specifications required by the industry. By combining the process variables of: plate speed, download pressure, slurry flow rate and concentration, pad type and wafer travel path across the polish pad, the effect of altering these variables was recorded and analysed to realize the optimum process conditions for the materials under test. The results being then used to design improved methods and tooling for the thinning and polishing of photonic materials applied to MOEMS-MEMS device fabrication.

Citation Download Citation

James J McAneny, Mark Kennedy, and Tom McGroggan "Advances in photonic MOEMS-MEMS device thinning and polishing", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 75900G (16 February 2010); https://doi.org/10.1117/12.842051

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