MEMS deformable mirrors for focus control in vital microscopy

B. Jeffrey Lutzenburger; Mohammad J. Moghimi; Sarah J. Lukes; Brant Kaylor; David L. Dickensheets

doi:10.1117/12.843874

16 February 2010 MEMS deformable mirrors for focus control in vital microscopy

B. Jeffrey Lutzenburger, Mohammad J. Moghimi, Sarah J. Lukes, Brant Kaylor, David L. Dickensheets

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759406 (2010) https://doi.org/10.1117/12.843874
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in diameter using the photo-cured epoxy SU-8 2002, constructed using a die-bonding process. They are electrostatically actuated using three concentric electrodes to provide large displacement while minimizing spherical aberration.

Citation Download Citation

B. Jeffrey Lutzenburger, Mohammad J. Moghimi, Sarah J. Lukes, Brant Kaylor, and David L. Dickensheets "MEMS deformable mirrors for focus control in vital microscopy", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759406 (16 February 2010); https://doi.org/10.1117/12.843874

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