Alternatives to chemical amplification for 193nm lithography

Burak Baylav; Meng Zhao; Ran Yin; Peng Xie; Chris Scholz; Bruce Smith; Thomas Smith; Paul Zimmerman

doi:10.1117/12.846924

29 March 2010 Alternatives to chemical amplification for 193nm lithography

Burak Baylav, Meng Zhao, Ran Yin, Peng Xie, Chris Scholz, Bruce Smith, Thomas Smith, Paul Zimmerman

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 763915 (2010) https://doi.org/10.1117/12.846924
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Research has been conducted to develop alternatives to chemically amplified 193 nm photoresist materials that will be able to achieve the requirements associated with sub-32 nm device technology. New as well as older photoresist design concepts for non-chemically amplified 193 nm photoresists that have the potential to enable improvements in line edge roughness while maintaining adequate sensitivity, base solubility, and dry etch resistance for high volume manufacturing are being explored. The particular platforms that have been explored in this work include dissolution inhibitor photoresist systems, chain scissioning polymers, and photoresist systems based on polymers incorporating formyloxyphenyl functional groups. In studies of two-component acidic polymer/dissolution inhibitor systems, it was found that compositions using ortho-nitrobenzyl cholate (NBC) as the dissolution inhibitor and poly norbornene hexafluoro alcohol (PNBHFA) as the base resin are capable of printing 90 nm dense line/space patterns upon exposure to a 193 nm laser. Studies of chain scission enhancement in methylmethacrylate copolymers showed that incorporating small amounts of absorptive a-cleavage monomers significantly enhanced sensitivity with an acceptable increase in absorbance at 193 nm. Specifically, it was found that adding 3 mol% of α-methyl styrene (α-MS) reduced the dose to clear of PMMA-based resist from 1400 mJ/cm² to 420 mJ/cm². Preliminary data are also presented on a direct photoreactive design concept based on the photo-Fries reaction of formyloxyphenyl functional groups in acrylic copolymers.

Citation Download Citation

Burak Baylav, Meng Zhao, Ran Yin, Peng Xie, Chris Scholz, Bruce Smith, Thomas Smith, and Paul Zimmerman "Alternatives to chemical amplification for 193nm lithography", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 763915 (29 March 2010); https://doi.org/10.1117/12.846924

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