Calculation and analysis for stiffness of the thrust aerostatic bearing of ultra-precision machine tools

Lihua Lu; Ziqiang Zhao; Yingchun Liang; Longjiang Zhang

doi:10.1117/12.866237

6 October 2010 Calculation and analysis for stiffness of the thrust aerostatic bearing of ultra-precision machine tools

Lihua Lu, Ziqiang Zhao, Yingchun Liang, Longjiang Zhang

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765507 (2010) https://doi.org/10.1117/12.866237
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The single point diamond turning (SPDT) lathe of vertical flying cutting milling style is one important ultra-precision machining method for Large-aperture optics. To realize ultra-precision machining with SPDT technology, the turning spindle of the machine tools should be with higher stiffness and stability. In this paper, based on finite element method (FEM), an iterative procedure is proposed and implemented to solve the fluid dynamic model and structure model for simulation the couple of air pressure and structure flexibility. Simulation results show that pressure in the air gap makes the plate deform and this deformation produced by the pressure adversely modifies the pressure distribution. Experimental results indicate that the method can predict the aerostatic spindle stiffness accurately, the prediction error is about 2.04%. These results show a relevant influence of the structural flexibility of the bearing on its static performance.

Citation Download Citation

Lihua Lu, Ziqiang Zhao, Yingchun Liang, and Longjiang Zhang "Calculation and analysis for stiffness of the thrust aerostatic bearing of ultra-precision machine tools", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765507 (6 October 2010); https://doi.org/10.1117/12.866237

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