Measurement and analysis of surface profiles by inverse scattering method

Shu-yan Chen; Xin-jun Xu

doi:10.1117/12.865564

12 October 2010 Measurement and analysis of surface profiles by inverse scattering method

Shu-yan Chen, Xin-jun Xu

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76565J (2010) https://doi.org/10.1117/12.865564
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Evaluation and measurement of surface profiles are very important especially to short wavelength optical research. A linear system treatment of short-wavelength surface scattering theory is introduced, and based on this, a new inverse scattering mathematical model of soft X-ray grazing incidence optics is established. By using these scattered light distributions of super-smooth surfaces measured by a soft X-ray reflectometer, the surface profiles of super-smooth surfaces are computed by means of inverse scattering mathematical model of soft X-ray grazing incidence optics. The calculating results are in accordance with those measured by WYKO. It can be concluded that the soft X-ray grazing incidence optical scattering method can calculate micro-roughness and surface auto correlation function of smooth surface accurately, and can give optical surface profiles intuitively.

Citation Download Citation

Shu-yan Chen and Xin-jun Xu "Measurement and analysis of surface profiles by inverse scattering method", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76565J (12 October 2010); https://doi.org/10.1117/12.865564

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